Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

1994 ◽  
Vol 13 (1) ◽  
pp. 43-45 ◽  
Author(s):  
K. Tsugeki ◽  
S. Yan ◽  
H. Maeda ◽  
K. Kusakabe ◽  
S. Morooka
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silica Coating ◽  
Aluminium Nitride ◽  
Radio Frequency Plasma ◽  
Plasma Chemical ◽  
Frequency Plasma ◽  
Plasma Chemical Vapour Deposition

Effect of pre-deposited carbon layer on the formation of carbon nitride nanostructures prepared by radio-frequency plasma enhanced chemical vapour deposition

2011 ◽  
Vol 130 (1-2) ◽  
pp. 218-222 ◽  
Author(s):  
Noor Hamizah Khanis ◽  
Richard Ritikos ◽  
Maisara Othman ◽  
Nur Maisarah Abdul Rashid ◽  
Siti Meriam Ab Gani ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Carbon Layer ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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