Effects of the deposition condition on the microstructure and properties of ZnO thin films deposited by metal organic chemical vapor deposition with ultrasonic nebulization

2016 ◽  
Vol 605 ◽  
pp. 157-162 ◽  
Author(s):  
Choon-Ho Lee ◽  
Min-Seok Choi
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Thin Films ◽  
Organic Chemical ◽  
Deposition Condition ◽  
Ultrasonic Nebulization ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition

2010 ◽  
Vol 256 (8) ◽  
pp. 2606-2610 ◽  
Author(s):  
Gaolin Zheng ◽  
Anli Yang ◽  
Hongyuan Wei ◽  
Xianglin Liu ◽  
Huaping Song ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Annealing Treatment ◽  
Chemical Vapor ◽  
Zno Thin Films ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition

2008 ◽  
Vol 310 (4) ◽  
pp. 777-782 ◽  
Author(s):  
Jr-Sheng Tian ◽  
Mei-Hui Liang ◽  
Yen-Teng Ho ◽  
Yuan-An Liu ◽  
Li Chang
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Thin Films ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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