Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films

2018 ◽  
Vol 660 ◽  
pp. 865-870 ◽  
Author(s):  
Shinya Iwashita ◽  
Kazuki Denpoh ◽  
Munehito Kagaya ◽  
Takamichi Kikuchi ◽  
Naotaka Noro ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Energy Control ◽  
Ion Energy ◽  
Titanium Dioxide Films ◽  
Layer Deposition

Selective Atomic Layer Deposition Mechanism for Titanium Dioxide Films with (EtCp)Ti(NMe2)3: Ozone versus Water

2018 ◽  
Vol 30 (3) ◽  
pp. 970-981 ◽  
Author(s):  
Joseph P. Klesko ◽  
Rezwanur Rahman ◽  
Aaron Dangerfield ◽  
Charith E. Nanayakkara ◽  
Thomas L’Esperance ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Mechanism ◽  
Titanium Dioxide Films ◽  
Layer Deposition

Atomic-layer deposition of thin titanium dioxide films from tetramethoxytitanium and water

2013 ◽  
Vol 86 (6) ◽  
pp. 817-823
Author(s):  
A. P. Alekhin ◽  
A. M. Markeev ◽  
D. V. Ovchinnikov ◽  
A. A. Solov’ev ◽  
V. F. Toknova
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Titanium Dioxide Films ◽  
Layer Deposition

Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide

2014 ◽  
Vol 26 (2) ◽  
pp. 024003 ◽  
Author(s):  
Stephan Ratzsch ◽  
Ernst-Bernhard Kley ◽  
Andreas Tünnermann ◽  
Adriana Szeghalmi
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Oxygen Plasma ◽  
Atomic Layer ◽  
Plasma Parameters ◽  
Layer Deposition

scholarly journals Novel Antimicrobial Titanium Dioxide Nanotubes Obtained through a Combination of Atomic Layer Deposition and Electrospinning Technologies

Nanomaterials ◽  
2018 ◽  
Vol 8 (2) ◽  
pp. 128 ◽  
Author(s):  
Carol López de Dicastillo ◽  
Cristian Patiño ◽  
María Galotto ◽  
Juan Palma ◽  
Daniela Alburquenque ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Titanium Dioxide Nanotubes ◽  
Layer Deposition
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