Influence of nitrogen partial pressure on optical properties of magnetron sputtered Al-Si-N thin films

2019 ◽  
Vol 682 ◽  
pp. 1-9 ◽  
Author(s):  
Soni ◽  
S.K. Mishra ◽  
S.K. Sharma
RSC Advances ◽  
2016 ◽  
Vol 6 (47) ◽  
pp. 40895-40899 ◽  
Author(s):  
Jianrong Xiao ◽  
Meng Qi ◽  
Yong Cheng ◽  
Aihua Jiang ◽  
Yaping Zeng ◽  
...  

Cu3N films were prepared by radio frequency magnetron sputtering techniques and the optical properties of the films were investigated.


2016 ◽  
Vol 619 ◽  
pp. 86-90 ◽  
Author(s):  
Firdous A. Tantray ◽  
Arpana Agrawal ◽  
Mukul Gupta ◽  
Joseph T. Andrews ◽  
Pratima Sen

2017 ◽  
Vol 7 ◽  
pp. 3349-3352 ◽  
Author(s):  
A.R. Grayeli Korpi ◽  
Sahare Rezaee ◽  
C. Luna ◽  
Ş. Ţălu ◽  
A. Arman ◽  
...  

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