Influence of nitrogen partial pressure on optical properties of magnetron sputtered Al-Si-N thin films
2011 ◽
Vol 257
(15)
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pp. 6554-6559
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Keyword(s):
2018 ◽
Vol 47
(8)
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pp. 4351-4355
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Keyword(s):
2015 ◽
Vol 41
(5)
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pp. 6269-6273
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Keyword(s):
Keyword(s):