Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes

2020 ◽  
Vol 701 ◽  
pp. 137950 ◽  
Author(s):  
Jae Hwan Lee ◽  
Bo-Eun Park ◽  
David Thompson ◽  
Myeonggi Choe ◽  
Zonghoon Lee ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Interface Quality ◽  
Metal Insulator ◽  
Metal Insulator Metal

Properties of atomic-vapor and atomic-layer deposited Sr, Ti, and Nb doped Ta2O5 Metal–Insulator–Metal capacitors

2012 ◽  
Vol 520 (14) ◽  
pp. 4576-4579 ◽  
Author(s):  
M. Lukosius ◽  
C. Baristiran Kaynak ◽  
S. Kubotsch ◽  
T. Blomberg ◽  
G. Ruhl ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Atomic Vapor ◽  
Metal Insulator ◽  
Metal Insulator Metal

Voltage linearity modulation and polarity dependent conduction in metal-insulator-metal capacitors with atomic-layer-deposited Al2O3/ZrO2/SiO2 nano-stacks

2015 ◽  
Vol 118 (1) ◽  
pp. 014501 ◽  
Author(s):  
Bao Zhu ◽  
Wen-Jun Liu ◽  
Lei Wei ◽  
David Wei Zhang ◽  
Anquan Jiang ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Metal Insulator ◽  
Metal Insulator Metal

Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric

2013 ◽  
Vol 102 (17) ◽  
pp. 173501 ◽  
Author(s):  
Alexander C. Kozen ◽  
Marshall A. Schroeder ◽  
Kevin D. Osborn ◽  
C. J. Lobb ◽  
Gary W. Rubloff
Keyword(s):  
Atomic Layer ◽  
Electrical Performance ◽  
Metal Insulator ◽  
Fabricated Metal ◽  
Metal Insulator Metal
Sign in / Sign up

Export Citation Format

Share Document