Precision defect engineering of metal/insulator/metal diodes using atomic layer deposition to localize Ni impurities in Al2O3 tunnel barriers

2021 ◽  
Vol 129 (14) ◽  
pp. 144502
Author(s):  
Konner E. K. Holden ◽  
Yitong Qi ◽  
John F. Conley
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Defect Engineering ◽  
Metal Insulator ◽  
Layer Deposition ◽  
Metal Insulator Metal ◽  
Tunnel Barriers

scholarly journals Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition

2017 ◽  
Vol 7 (3) ◽  
pp. 246 ◽  
Author(s):  
Golnaz Karbasian ◽  
Michael McConnell ◽  
Hubert George ◽  
Louisa Schneider ◽  
Matthew Filmer ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Single Electron ◽  
Single Electron Transistors ◽  
Metal Insulator ◽  
Layer Deposition ◽  
Metal Insulator Metal ◽  
Tunnel Barriers ◽  
Electron Transistors
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