Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
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2011 ◽
Vol 29
(1)
◽
pp. 01AC04
◽
2019 ◽
Vol 37
(5)
◽
pp. 050903
2019 ◽
Vol 37
(1)
◽
pp. 011209
◽
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