Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
Keyword(s):
1976 ◽
Vol 123
(8)
◽
pp. 1201-1207
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Influence of reactive sputter deposition conditions on crystallization of zirconium oxide thin films
2009 ◽
Vol 27
(3)
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pp. 577-583
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Keyword(s):
2013 ◽
Vol 231
◽
pp. 2-5
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Keyword(s):
2000 ◽
Vol 360
(1-2)
◽
pp. 122-127
◽
2008 ◽
Vol 20
(26)
◽
pp. 264006
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Keyword(s):