RDF Analysis of Ion-Amorphized SiO2 and SiC from Electron Diffraction using Post-Specimen Scanning in the Field-Emission Scanning Transmission Electron Microscope

1997 ◽  
Vol 504 ◽  
Author(s):  
David C. Bell ◽  
Anthony J. Garratt-Reed ◽  
Linn W. Hobbst
Keyword(s):  
Electron Microscope ◽  
Electron Diffraction ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Spherical Aberration ◽  
Scanning Transmission Electron Microscope ◽  
Objective Lens ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

ABSTRACTRadial density functions (RDFs) provide important information about short- and ntermediaterange structure of topologically-disordered materials such as glasses and irradiation-amorphized materials. We have determined RDFs for irradiation-amorphized SiO2, AIPO4 and SiC by energy-filtered electron diffraction methods in a field-emission scanning transmission electron microscope (FEG-STEM) equipped with a digital parallel-detection electron energy-loss spectrometer. Post-specimen rocking was used to minimize the effects of spherical aberration in the objective lens, which interfere with the acquisition of data collected by pre-specimen rocking. Useful energy-filtered data has been collected beyond an angular range defined by q = 2 sin(Θ/2)/λ = 25 nm−1

Resolution in the Scanning Transmission Electron Microscope

1972 ◽  
Vol 30 ◽  
pp. 454-455
Author(s):  
M. G. R. Thomson
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Spherical Aberration ◽  
Signal To Noise Ratio ◽  
Scanning Transmission Electron Microscope ◽  
Dark Field ◽  
Objective Lens ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

The variation of contrast and signal to noise ratio with change in detector solid angle in the high resolution scanning transmission electron microscope was discussed in an earlier paper. In that paper the conclusions were that the most favourable conditions for the imaging of isolated single heavy atoms were, using the notation in figure 1, either bright field phase contrast with β0⋍0.5 α0, or dark field with an annular detector subtending an angle between ao and effectively π/2.The microscope is represented simply by the model illustrated in figure 1, and the objective lens is characterised by its coefficient of spherical aberration Cs. All the results for the Scanning Transmission Electron Microscope (STEM) may with care be applied to the Conventional Electron Microscope (CEM). The object atom is represented as detailed in reference 2, except that ϕ(θ) is taken to be the constant ϕ(0) to simplify the integration. This is reasonable for θ ≤ 0.1 θ0, where 60 is the screening angle.

Unique Features of a High Resolution Scanning Transmission Electron Microscope

1974 ◽  
Vol 32 ◽  
pp. 404-405
Author(s):  
J. W. Wiggins ◽  
M. Beer ◽  
D. C. Woodruff ◽  
J. A. Zubin
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Transmission Electron Microscope ◽  
Heavy Atom ◽  
Scanning Transmission Electron Microscope ◽  
Objective Lens ◽  
Optical Parameters ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

A high resolution scanning transmission electron microscope has been constructed and is operating. The initial task of this instrument is to attempt the sequencing of DNA by heavy-atom specific staining. It is also suitable for many other biological investigations requiring high resolution, low contamination and minimum radiation damage.The basic optical parameters are: 20 to 100 KV acceleration potential, objective lens focal length of 1.0 mm. with Cs = 0.7 mm., and two additional lenses designated as condensor and diffraction lenses. The purpose of the condensor lens is to provide a parallel beam incident to the objective, and the diffraction lens produces an image of the back focal plane of the objective in the plane of an annular detector.

Development of a Real-Time Elemental Mapping System in a Scanning Transmission Electron Microscope

2000 ◽  
Vol 6 (S2) ◽  
pp. 178-179
Author(s):  
K. Kaji Ueda ◽  
T. Aoyama ◽  
S. Taya ◽  
H. Tanaka ◽  
S. Isakozawa
Keyword(s):  
Electron Microscope ◽  
Real Time ◽  
Transmission Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
Objective Lens ◽  
Elemental Mapping ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Mapping System ◽  
Scanning Transmission

The ability to obtain elemental maps in a transmission electron microscope (TEM) or scanning transmission electron microscope (STEM) is extremely useful in the analysis of materials, and semiconductor devices such as ULSI's and GMR heads. Hitachi has developed a new type of elemental mapping system, consisting of a STEM (Hitachi, HD-2000) equipped with a two-window electron energy filter. In-situ calculation of the energy-filtered signal makes it possible to observe real time elemental mapping images with nanometer resolution.Figure 1 shows a schematic of the elemental mapping system. In the STEM, electrons are generated from a cold field emission gun and accelerated to a potential of 200 kV. The electrons arc focused by the objective lens into a small probe (<1 nm), which is then rastered over the specimen using scanning coils. Transmitted electrons are collected by an energy filter, which is located beneath the specimen., and consists of quadrupole lenses, a magnetic prism spectrometer and two kinds of electron beam energy detectors.

A Prototype Field-Emission Scanning Transmission Electron Microscope

1973 ◽  
Vol 31 ◽  
pp. 296-297
Author(s):  
J.R. Banbury ◽  
U. R. Bance
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Wide Range ◽  
Scanning Transmission ◽  
Further Development ◽  
Diode Voltage

A prototype field emission scanning transmission electron microscope has been constructed and is under further development at AEI Scientific Apparatus Limited.The field emission gun has a triode construction, with geometry such as to produce a divergent beam from a virtual source whose position remains substantially constant over a wide range of total accelerating voltages. The gun has been operated satisfactorily from below 10 kV to over 90 kV (upper limit set by power supplies), with the field emission diode voltage typically between 2 kV and 4 kV and total emission of a few microamps. Single-crystal tungsten tips of either (111) or (310) orientation are used, though (310) tips normally produce a superior probe current stability.

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