An Ortec Si(Li) energy dispersive X-ray detector designed for use on a Cambridge scanning electron microscope has been coupled to a Siemens transmission electron microscope by replacing the side tilt control on the Siemens by a brass tube as shown in figure 1. The Siemens specimen holder was modified to tilt the specimen approximately 20° from a horizontal position and to elevate it such that it is just visible to the detector through the side port. This increased specimen height requires an objective focal length of greater than 8 mm and consequently effects a lower resolution of the image, especially at low accelerating voltages. The peak/background in the X-ray spectra is best at 40kV, however, and deteriorates progressively with increasing accelerating voltage.Experiments similar to those of Fuchs, who employed a wavelength dispersive system on a Siemens TEM to measure film thickness, were repeated with the present energy dispersive system by analysing spectra from vacuum deposited gold films of various thicknesses. A linear relation between peak height and thickness was confirmed for several films up to 2000Å thick by comparing spectra from two adjacent grid squares, one covered by a single thickness of gold, the other covered by a double thickness, and noting that the peak heights were in the ratio of 1:2 to within a few percent.