Surface morphology of AlN films synthesized by pulsed laser deposition

Vacuum ◽  
2009 ◽  
Vol 84 (1) ◽  
pp. 155-157 ◽  
Author(s):  
S. Bakalova ◽  
A. Szekeres ◽  
G. Huhn ◽  
K. Havancsak ◽  
S. Grigorescu ◽  
...  
2019 ◽  
Vol 25 (24) ◽  
pp. 19-25
Author(s):  
Takeshi Ito ◽  
Satoru Kaneko ◽  
Yasuo Hirabayashi ◽  
Masayasu Soga ◽  
Koji Suzuki

2000 ◽  
Vol 617 ◽  
Author(s):  
Masaaki Yamazato ◽  
Masamitsu Nagano ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara

AbstractFerroelectric PbZr0.52Ti0.48O3(PZT)/YBa2 Cu3O7−x(YBCO) heterostructures on MgO substrate were fabricated by KrF pulsed laser deposition. The grid electrode was set between a substrate and target for improvement of surface morphology. The typical PZT layer had excellent ferroelectric properties; remnant polarization of 39 µC/cm2, coercive electric field of 41 kV/cm, loss tan δ=0.04, and dielectric constant of 950. X-ray diffraction results show that the films had highly c-axis and (a, b) plane orientation. The full widths at half-maximum (FWHM) of rocking curves was decreased with increasing the applied voltage of grid electrode. Atomic force microscopy (AFM) images of PZT layer showed that the film morphology was improved by using a grid electrode.


2009 ◽  
Vol 256 (4) ◽  
pp. 1227-1231 ◽  
Author(s):  
M. Zakir Hossain ◽  
Tomohiro Mimura ◽  
Noboru Miura ◽  
Shin-ichiro Uekusa

2009 ◽  
Vol 66 ◽  
pp. 183-186
Author(s):  
L. Li ◽  
Chuan Bin Wang ◽  
Qiang Shen ◽  
Lian Meng Zhang

Barium dititanate (BaTi2O5) films were prepared on MgO (100) substrate by pulsed laser deposition under various laser energy densities. The effect of laser energy on crystallinity, orientation and surface morphology was investigated. The preferred orientation of the as-deposited films changes from (710) to (020) with decreasing laser energy, and the surface morphology is different depending on laser energy too. The b-axis oriented BaTi2O5 film could be obtained at the laser energy density of 2J/cm2, where the film shows a dense surface with an elongated granular texture.


Sign in / Sign up

Export Citation Format

Share Document