Effects of oxygen flow rate on microstructure and optical properties of aluminum oxide films deposited by electron beam evaporation technique

Vacuum ◽  
2010 ◽  
Vol 85 (2) ◽  
pp. 214-220 ◽  
Author(s):  
Namita Maiti ◽  
A. Biswas ◽  
R.B. Tokas ◽  
D. Bhattacharyya ◽  
S.N. Jha ◽  
...  
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