Annealing effects on a-SiC:H and a-SiCN:H films deposited by plasma CVD methods
1989 ◽
Vol 50
(C5)
◽
pp. C5-739-C5-746
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2013 ◽
Vol 51
(9)
◽
pp. 691-699
Keyword(s):
2010 ◽
Vol 130
(4)
◽
pp. 319-324
2007 ◽
2014 ◽
Vol 504
◽
pp. 8-11
◽
2020 ◽
Keyword(s):