Characterization of diffuse reflectance fiber probe sampling on moving solids using a Fourier transform near-infrared spectrometer

2001 ◽  
Vol 431 (1) ◽  
pp. 125-131 ◽  
Author(s):  
O. Berntsson ◽  
L.-G. Danielsson ◽  
S. Folestad
Keyword(s):  
Fourier Transform ◽  
Diffuse Reflectance ◽  
Near Infrared ◽  
Fiber Probe ◽  
Infrared Spectrometer ◽  
Near Infrared Spectrometer

A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer

2013 ◽  
Vol 797 ◽  
pp. 549-554 ◽  
Author(s):  
Teppei Onuki ◽  
Ryusuke Ono ◽  
Akira Suzuki ◽  
Hirotaka Ojima ◽  
Jun Shimizu ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Measurement System ◽  
Near Infrared ◽  
Thickness Measurement ◽  
High Spectral Resolution ◽  
High Signal ◽  
Infrared Band ◽  
Infrared Spectrometer ◽  
Near Infrared Spectrometer ◽  
Thickness Measurement System

In this study, measurable thickness range was improved by re-customized components of the thickness measurement system using the method of Fabry-Perot interference signature analyzing. A Fourier transform near infrared (FT-NIR) spectrometer with indium gallium arsenide was used in the developed system. As a result of the sensitiveness in the whole near infrared band and high spectral resolution united with high signal noise ratio of the FT-NIR spectrometer, the maximum measurable thickness is improved to 88μm while sub-micron order of the minimum measurable thickness is also improved.

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