Optical emission spectroscopic study of a radio-frequency plasma of Ar+SiH4
1998 ◽
Vol 298
(1-3)
◽
pp. 211-216
◽
Keyword(s):
2009 ◽
Vol 18
(2)
◽
pp. 102-107
1995 ◽
Vol 05
(C5)
◽
pp. C5-607-C5-614
Keyword(s):
2000 ◽
Vol 50
(S3)
◽
pp. 349-355
◽
2002 ◽
Vol 42
(Suppl)
◽
pp. S101-S105
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2006 ◽
Vol 64
(4)
◽
pp. 901-905
2013 ◽
Vol 13
(7)
◽
pp. 1448-1453
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1998 ◽
Vol 16
(4)
◽
pp. 2162-2172
◽
2021 ◽
Vol 1923
(1)
◽
pp. 012020