Air-turbine driven optical low-coherence reflectometry at 28.6-kHz scan repetition rate

1998 ◽  
Vol 154 (1-3) ◽  
pp. 1-4 ◽  
Author(s):  
J Szydlo ◽  
N Delachenal ◽  
R Gianotti ◽  
R Wälti ◽  
H Bleuler ◽  
...  
Keyword(s):  
Repetition Rate ◽  
Low Coherence ◽  
Air Turbine ◽  
Optical Low Coherence Reflectometry

Low Coherence Interferometry for Non-Invasive Semiconductor Monitoring

1993 ◽  
Vol 324 ◽  
Author(s):  
Chris M. Lawson ◽  
Robert R. Michael
Keyword(s):  
Solar Cell ◽  
Manufacturing Processes ◽  
Growth Monitoring ◽  
Low Coherence ◽  
Non Invasive ◽  
Low Coherence Interferometry ◽  
Silicon Growth ◽  
Silicon Thickness ◽  
Efficient Solar Cell ◽  
Optical Low Coherence Reflectometry

AbstractWe report on the first use of optical low coherence reflectometry (OLCR) for Edge Defined Film-Fed Growth (EFG) silicon characterization. This OLCR sensor system has been used to measure horizontal profiles of silicon thickness and flatness to an accuracy of 1.5 Rim with the sensor head positioned 1 cm away from the silicon. The use of this noninvasive sensor for EFG silicon growth monitoring may lead to more efficient solar cell manufacturing processes.

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