The oxidation processes for compact and powdery samples of titanium, copper, and molybdenum with different volume structure and dispersivity were studied using thermal analysis, electron microscopy, and X-ray diffraction. It is established that producing of metals with a modified structure under conditions of high-energy impact (severe plastic deformation, electric explosion of a thin wire) in accordance with intermediate annealing leads to an increase in the content of oxygen in the form of solid solutions and oxides; the oxide component’s share, form and localization within the material depend on physicochemical properties of both metal and oxide . It is shown that the structural-phase transformations of the oxide component during heating of fine-grained metals and powders have a significant effect on the parameters of the oxidation process of such materials. The thermally induced effects in the oxygen-containing components might play a critical role for the structure stability during long-term use of such materials under cyclic thermomechanical impacts.