Chemical vapor deposition of ruthenium oxide thin films from Ru(tmhd)3 using direct liquid injection

2002 ◽  
Vol 413 (1-2) ◽  
pp. 237-242 ◽  
Author(s):  
Dong-Jin Lee ◽  
Sang-Woo Kang ◽  
Shi-Woo Rhee
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Ruthenium Oxide ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Direct Liquid Injection

Direct liquid injection chemical vapor deposition of platinum doped cerium oxide thin films

2015 ◽  
Vol 589 ◽  
pp. 246-251 ◽  
Author(s):  
N. Zanfoni ◽  
L. Avril ◽  
L. Imhoff ◽  
B. Domenichini ◽  
S. Bourgeois
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Cerium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Direct Liquid Injection

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

scholarly journals Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)[sub 3] (OD=octanedionate)

2000 ◽  
Vol 18 (5) ◽  
pp. 2400 ◽  
Author(s):  
Jung-Hyun Lee ◽  
Joo-Young Kim ◽  
Shi-Woo Rhee ◽  
DooYoung Yang ◽  
Dong-Hyun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Liquid Injection ◽  
Direct Liquid Injection

Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane

2017 ◽  
Vol 19 (12) ◽  
pp. 1700425 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silica Thin Films ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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