scholarly journals Chemical Vapor Deposition of Barium Strontium Titanate Thin Films by the Direct Liquid Injection of Ba(methd)[sub 2], Sr(methd)[sub 2], and Ti(mpd)(tmhd)[sub 2] Without Solvent

1999 ◽  
Vol 2 (10) ◽  
pp. 510 ◽  
Author(s):  
Jung-Hyun Lee
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Barium Strontium ◽  
Liquid Injection ◽  
Direct Liquid Injection

Composition Control of Barium Strontium Titanate Thin Films Prepared by Chemical Vapor Deposition

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4487-4492 ◽  
Author(s):  
Masahiro Kiyotoshi ◽  
Kazuhiro Eguchi ◽  
Keitaro Imai ◽  
Tsunetoshi Arikado
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Composition Control ◽  
Barium Strontium

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

scholarly journals Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)[sub 3] (OD=octanedionate)

2000 ◽  
Vol 18 (5) ◽  
pp. 2400 ◽  
Author(s):  
Jung-Hyun Lee ◽  
Joo-Young Kim ◽  
Shi-Woo Rhee ◽  
DooYoung Yang ◽  
Dong-Hyun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Liquid Injection ◽  
Direct Liquid Injection

Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane

2017 ◽  
Vol 19 (12) ◽  
pp. 1700425 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silica Thin Films ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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