Preparation of Pt thin films deposited by metalorganic chemical vapor deposition for ferroelectric thin films

1997 ◽  
Vol 303 (1-2) ◽  
pp. 136-142 ◽  
Author(s):  
Ju-Hong Kwon ◽  
Soon-Gil Yoon
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Ferroelectric Thin Films ◽  
Metalorganic Chemical

Metal Complexes for Preparing Ferroelectric Thin Films by Metalorganic Chemical Vapor Deposition

1992 ◽  
Vol 31 (Part 1, No. 9B) ◽  
pp. 2992-2994 ◽  
Author(s):  
Tomoaki Nakai ◽  
Toshiya Tabuchi ◽  
Yoshinori Sawado ◽  
Ichizo Kobayashi ◽  
Yoshiaki Sugimori
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Metal Complexes ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Ferroelectric Thin Films ◽  
Metalorganic Chemical

Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films

2000 ◽  
Vol 87 (10) ◽  
pp. 7430-7437 ◽  
Author(s):  
Y. Gao ◽  
C. L. Perkins ◽  
S. He ◽  
P. Alluri ◽  
T. Tran ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Mechanistic Study ◽  
Metalorganic Chemical
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