Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry
2001 ◽
Vol 136
(1-3)
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pp. 261-264
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1987 ◽
Vol 32
(2)
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pp. 357-360
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2012 ◽
Vol 83
(7)
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pp. 075102
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1997 ◽
Vol 93
(2-3)
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pp. 238-241
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Keyword(s):
2002 ◽
Vol 156
(1-3)
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pp. 83-86
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1992 ◽
Vol 39
(3)
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pp. 464-467
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1999 ◽
Vol 70
(6)
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pp. 2818-2821
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2006 ◽
Vol 28
(7)
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pp. 648-655
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