Reactive magnetron sputtering deposition of TiN films. I. Influence of the substrate temperature on structure, composition and morphology of the films
1997 ◽
Vol 88
(1-3)
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pp. 17-27
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1997 ◽
Vol 88
(1-3)
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pp. 28-37
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2017 ◽
Vol 43
(9)
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pp. 5123-5136
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2006 ◽
Vol 24
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pp. 1441-1447
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2021 ◽
2010 ◽
Vol 56
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pp. 1134-1139
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Keyword(s):
2011 ◽
Vol 11
(2)
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pp. 1758-1761
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2016 ◽
Vol 37
(3)
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pp. 289-292
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