Effect of ion collisions on Langmuir probe measurements in Ti - N deposition by unbalanced magnetron sputtering

1996 ◽  
Vol 29 (1) ◽  
pp. 99-104 ◽  
Author(s):  
C Wiemer ◽  
F Lévy ◽  
R Messier
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
N Deposition ◽  
Ion Collisions ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements

scholarly journals Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System

2012 ◽  
Vol 32 ◽  
pp. 962-968 ◽  
Author(s):  
K. Honglertkongsakul ◽  
S. Chaiyakun ◽  
N. Witit-anun ◽  
W. Kongsri ◽  
P. Limsuwan
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System

2017 ◽  
Vol 48 (1) ◽  
pp. 61-66 ◽  
Author(s):  
Julio César Sagás ◽  
Rodrigo Sávio Pessoa ◽  
Homero Santiago Maciel
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System

Study of an RF planar magnetron sputtering discharge with Langmuir probe measurements

1998 ◽  
Vol 98 (1-3) ◽  
pp. 1426-1432 ◽  
Author(s):  
P.-Y. Jouan ◽  
A.-C. Vanderbecq ◽  
J.-P. Dauchot ◽  
M. Wautelet ◽  
M. Hecq
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Planar Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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