Plasma-source ion implantation compared with glow-discharge plasma nitriding of stainless steel

1999 ◽  
Vol 112 (1-3) ◽  
pp. 307-309 ◽  
Author(s):  
R. Günzel ◽  
M. Betzl ◽  
I. Alphonsa ◽  
B. Ganguly ◽  
P.I. John ◽  
...  
2007 ◽  
Vol 9 (4) ◽  
pp. 463-468 ◽  
Author(s):  
A Qayyum ◽  
M A Naveed ◽  
S Zeb ◽  
G Murtaza ◽  
M Zakaullah

1995 ◽  
Vol 396 ◽  
Author(s):  
D.J. Rej ◽  
N.V. Gavrilov ◽  
D. Emlin ◽  
I. Henins ◽  
K. Kern ◽  
...  

AbstractIon implantation experiments of C, N and O into stainless steel have been performed with beam-line and plasma source ion implantation methods. Acceleration voltages are varied between 27 and 50 kV, with pulsed ion current densities between 1 and 10 mA/cm2. Implanted doses range from 0.5 to 3×1018cm-2, while workpiece temperatures are maintained between 25 and 800°C. The implant concentration profiles, microstructure and surface mechanical properties of the implanted materials are reported.


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