Study of (La1-xMx)2CuO4+δ annealed in high pressure oxygen gas

1990 ◽  
Vol 165-166 ◽  
pp. 1663-1664 ◽  
Author(s):  
Yasukage Oda ◽  
Masaru Yamada ◽  
Kunisuke Asayama ◽  
Takao Kohara ◽  
Yoshihiro Yamada
2010 ◽  
Vol 447-448 ◽  
pp. 61-65 ◽  
Author(s):  
Kei Kitamura ◽  
Toshiro K. Doi ◽  
Syuhei Kurokawa ◽  
Yoji Umezaki ◽  
Yoji Matsukawa ◽  
...  

We designed and manufactured a prototype of a unique CMP machine, which can perform double-side CMP simultaneously in a sealed and pressure container as regarding effective action of the processing atmosphere around workpieces as important. Polishing experiments with single crystal silicon (Si) wafers (100) are performed by charging the container with various gases. As a result, the removal rates increased by up to 25% under high pressure oxygen gas atmosphere.


1991 ◽  
Vol 185-189 ◽  
pp. 917-918 ◽  
Author(s):  
Y. Oda ◽  
A. Sumiyama ◽  
T. Kohara ◽  
M. Yamada ◽  
K. Asayama ◽  
...  

1990 ◽  
Vol 73 (10) ◽  
pp. 725-728 ◽  
Author(s):  
Yasukage Oda ◽  
Masaru Yamada ◽  
Hirofumi Ochiai ◽  
Kunisuke Asayama ◽  
Takao Kohara ◽  
...  

Author(s):  
Brian Drouin ◽  
Jiajun Hoo ◽  
V. Devi ◽  
D. Benner ◽  
David Robichaud ◽  
...  

2001 ◽  
Author(s):  
B. Vyskubenko ◽  
A. Adamenkov ◽  
S. Ilyin ◽  
Yu. Kolobyanin ◽  
I. Krukovsky ◽  
...  

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