Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions
1999 ◽
Vol 68
(1)
◽
pp. 1-4
◽
2018 ◽
Vol 10
(5)
◽
pp. 05010-1-05010-6
Keyword(s):
2006 ◽
Vol 86
(1)
◽
pp. 159-169
◽
Keyword(s):
Influence of reactive sputter deposition conditions on crystallization of zirconium oxide thin films
2009 ◽
Vol 27
(3)
◽
pp. 577-583
◽
Keyword(s):
2000 ◽
Vol 80
(6)
◽
pp. 1153-1165
◽