Preparation of silicon carbide nitride films on Si substrate by pulsed high-energy density plasma
2006 ◽
Vol 13
(3)
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pp. 272-276
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2017 ◽
Vol 137
(10)
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pp. 564-569
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2004 ◽
Vol 384
(1-2)
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pp. 202-208
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2010 ◽
Vol 6
(2)
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pp. 179-184
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2010 ◽
Vol 124
(1)
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pp. 287-290
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2002 ◽
Vol 200
(1-4)
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pp. 104-110
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