Influence of thermal annealing on bonding structure and dielectric properties of fluorinated amorphous carbon film
2002 ◽
Vol 2
(6)
◽
pp. 439-443
◽
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Keyword(s):
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1995 ◽
Vol 185
(1-2)
◽
pp. 145-150
◽
1977 ◽
Vol 35
◽
pp. 80-81
Keyword(s):
Keyword(s):