Resolution of a Transmitted Electron Image Formed by A Scanning Electron Microscope
1970 ◽
Vol 28
◽
pp. 386-387
Keyword(s):
The resolution of a conventional transmission electron microscope (TEM) deteriorates as the specimen thickness increases, because chromatic aberration of the objective lens is caused by the energy loss of electrons). In the case of a scanning electron microscope (SEM), chromatic aberration does not exist as the restrictive factor for the resolution of the transmitted electron image, for the SEM has no imageforming lens. It is not sure, however, that the equal resolution to the probe diameter can be obtained in the case of a thick specimen. To study the relation between the specimen thickness and the resolution of the trans-mitted electron image obtained by the SEM, the following experiment was carried out.
1971 ◽
Vol 29
◽
pp. 26-27
1997 ◽
Vol 3
(S2)
◽
pp. 1243-1244
◽
1973 ◽
Vol 31
◽
pp. 20-21
1976 ◽
Vol 34
◽
pp. 540-541
1988 ◽
Vol 46
◽
pp. 202-203
1981 ◽
Vol 39
◽
pp. 320-321
1990 ◽
Vol 48
(3)
◽
pp. 202-203
1994 ◽
Vol 52
◽
pp. 1018-1019
1989 ◽
Vol 47
◽
pp. 74-75
1990 ◽
Vol 48
(3)
◽
pp. 306-307