Characterization of a Fixed Beam Electron Microscope with a Field Emission Gun
One of the objectives of our research program is to obtain a 2.0 Å point to point resolution in a fixed beam bright field electron microscope. The resolution in the fixed beam electron microscope is limited by a number of factors: electron beam coherence, energy spread, objective lens stability, mechanical stability, and specimen stability. This paper presents systematic studies of the mentioned factors in our JEM 100B fixed beam electron microscope equipped with a field emission gun operating at ∼ 1800°K.The most important characteristic of a field emission gun is its high brightness in the emitter source. In order to estimate the brightness at the specimen plane, one needs to measure the electron beam current density and the angle of illumination. The electron beam current density has been measured by means of a lithium-drifted silicon detector located below the normal position of the photographic plates. The angle of illumination can be estimated from the size of the condenser aperture and its distance from the specimen plane.