Local Lattice Parameter Determination of Strained Areas of Semiconductors Using CBED

AbstractA method for using synchrotron-radiation parallel-beam X-ray diffractometry for precision measurement of scattering angles and lattice parameters is described. The important advantages of the method are the high P/B made possible by wavelength selection and high source intensity, the symmetrical profiles and the absence of most systematic errors making it unnecessary to use standards. Profile fitting with a pseudo-Voigt function is used to determine 2θ to 0.0001º. The zero-angle correction and lattice parameter were determined from least-squares refinement and the average accuracy of observed-calculated 2θs was 0.0020°. Average values of ∆d/d = ∆a/a directly calculated from the individual hkl measurements ranged from 2x 10-5 to 5.7 x 10-5. The precision estimated from the standard deviation of the mean is in the 10-6 range and 1 ppm precision was obtained for Si. The determination of the exact wavelength selected remains to be solved, but ratios of lattice spacings to standards such as NBS SRM 640a can be determined.

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Lattice parameter determination of a composition controlled Si1-x Gex layer on a Si (001) substrate using convergent-beam electron diffraction

Journal of Electron Microscopy ◽

10.1093/jmicro/dfh091 ◽

2004 ◽

Vol 53 (6) ◽

pp. 593-600 ◽

Cited By ~ 2

Author(s):

T. Akaogi

Keyword(s):

Electron Diffraction ◽

Lattice Parameter ◽

Convergent Beam Electron Diffraction ◽

Parameter Determination ◽

Beam Electron ◽

Convergent Beam

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In-plane lattice parameter determination of Zn:LiNbO3thin films epitaxially grown on x-cut LiNbO3substrates using X-ray diffraction methods

physica status solidi (a) ◽

10.1002/pssa.200675661 ◽

2007 ◽

Vol 204 (8) ◽

pp. 2585-2590 ◽

Cited By ~ 5

Author(s):

J. Kräußlich ◽

C. Dubs ◽

A. Lorenz ◽

A. Tünnermann

Keyword(s):

Lattice Parameter ◽

Parameter Determination ◽

X Ray Diffraction ◽

X Ray ◽

Plane Lattice

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High precision lattice parameter determination of KDP with different crystal perfection

Crystal Research and Technology ◽

10.1002/crat.2170180129 ◽

1983 ◽

Vol 18 (1) ◽

pp. K28-K30 ◽

Cited By ~ 1

Author(s):

S. Grosswig ◽

W. Melle ◽

U. Schellenberger ◽

W. Zahorowski

Keyword(s):

High Precision ◽

Lattice Parameter ◽

Parameter Determination ◽

Crystal Perfection

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High-precision absolute lattice parameter determination of SrTiO3, DyScO3 and NdGaO3 single crystals

Acta Crystallographica Section B Structural Science ◽

10.1107/s0108768111046738 ◽

2012 ◽

Vol 68 (1) ◽

pp. 8-14 ◽

Cited By ~ 63

Author(s):

Martin Schmidbauer ◽

Albert Kwasniewski ◽

Jutta Schwarzkopf

Keyword(s):

High Resolution ◽

High Precision ◽

Room Temperature ◽

Systematic Errors ◽

Lattice Parameter ◽

Parameter Determination ◽

X Ray Diffraction ◽

X Ray ◽

Bond Method

The lattice parameters of three perovskite-related oxides have been measured with high precision at room temperature. An accuracy of the order of 10−5 has been achieved by applying a sophisticated high-resolution X-ray diffraction technique which is based on the modified Bond method. The results on cubic SrTiO3 [a = 3.905268 (98) Å], orthorhombic DyScO3 [a = 5.442417 (54), b = 5.719357 (52) and c = 7.904326 (98) Å], and orthorhombic NdGaO3 [a = 5.428410 (54), b = 5.498407 (55) and c = 7.708878 (95) Å] are discussed in view of possible systematic errors as well as non-stoichiometry in the crystals.

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