Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

2009 ◽  
Vol 15 (5) ◽  
pp. 441-453 ◽  
Author(s):  
A.R. Lupini ◽  
A.Y. Borisevich ◽  
J.C. Idrobo ◽  
H.M. Christen ◽  
M. Biegalski ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Scanning Transmission Electron Microscope ◽  
Third Order ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Microscopes ◽  
Dopant Atoms ◽  
Fifth Order ◽  
Initial Results ◽  
Aberration Corrected

AbstractThe successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.

Tuning Fifth-Order Aberrations in a Quadrupole-Octupole Corrector

2012 ◽  
Vol 18 (4) ◽  
pp. 699-704 ◽  
Author(s):  
Andrew R. Lupini ◽  
Stephen J. Pennycook
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Spherical Aberration ◽  
Scanning Transmission Electron Microscope ◽  
Low Energy ◽  
Third Order ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Microscopes ◽  
Fifth Order

AbstractThe resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.

scholarly journals Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope

2009 ◽  
Vol 15 (S2) ◽  
pp. 1488-1489
Author(s):  
Y Oshima ◽  
Y Hashimoto ◽  
H Sawada ◽  
N Hashikawa ◽  
K Asayama ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Silicon Crystal ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Dopant Atoms ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Ultrahigh-Vacuum Third-Order Spherical Aberration (Cs) Corrector for a Scanning Transmission Electron Microscope

2006 ◽  
Vol 12 (6) ◽  
pp. 456-460 ◽  
Author(s):  
Kazutaka Mitsuishi ◽  
Masaki Takeguchi ◽  
Yukihito Kondo ◽  
Fumio Hosokawa ◽  
Kimiharu Okamoto ◽  
...  
Keyword(s):  
Materials Science ◽  
Spherical Aberration ◽  
Ultrahigh Vacuum ◽  
Scanning Transmission Electron Microscope ◽  
Third Order ◽  
Scanning Transmission Electron ◽  
Spot Area ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Fifth Order

Initial results from an ultrahigh-vacuum (UHV) third-order spherical aberration (Cs) corrector for a dedicated scanning transmission electron microscopy, installed at the National Institute for Materials Science, Tsukuba, Japan, are presented here. The Cs corrector is of the dual hexapole type. It is UHV compatible and was installed on a UHV column. The Ronchigram obtained showed an extension of the sweet spot area, indicating a successful correction of the third-order spherical aberration Cs. The power spectrum of an image demonstrated that the resolution achieved was 0.1 nm. A first trial of the direct measurement of the fifth-order spherical aberration C5 was also attempted on the basis of a Ronchigram fringe measurement.

Aberration-Corrected Scanning Transmission Electron Microscope (STEM) Through-Focus Imaging for Three-Dimensional Atomic Analysis of Bismuth Segregation on Copper [001]/33° Twist Bicrystal Grain Boundaries

2016 ◽  
Vol 22 (3) ◽  
pp. 679-689 ◽  
Author(s):  
Charles Austin Wade ◽  
Mark J. McLean ◽  
Richard P. Vinci ◽  
Masashi Watanabe
Keyword(s):  
Electron Microscope ◽  
Grain Boundaries ◽  
Transmission Electron Microscope ◽  
Three Dimensional ◽  
Depth Resolution ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected

AbstractScanning transmission electron microscope (STEM) through-focus imaging (TFI) has been used to determine the three-dimensional atomic structure of Bi segregation-induced brittle Cu grain boundaries (GBs). With TFI, it is possible to observe single Bi atom distributions along Cu [001] twist GBs using an aberration-corrected STEM operating at 200 kV. The depth resolution is ~5 nm. Specimens with GBs intentionally inclined with respect to the microscope’s optic axis were used to investigate Bi segregant atom distributions along and through the Cu GB. It was found that Bi atoms exist at most once per Cu unit cell along the GB, meaning that no continuous GB film is present. Therefore, the reduced fracture toughness of this particular Bi-doped Cu boundary would not be caused by fracture of Bi–Bi bonds.

Fast Throughput Low Voltage Scanning Transmission Electron Microscope Imaging of Nano-Resolution Three Dimensional Tissue

2009 ◽  
Vol 15 (S2) ◽  
pp. 642-643
Author(s):  
M Bolorizadeh ◽  
HF Hess
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
Three Dimensional ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Microscope Imaging ◽  
Electron Microscope Imaging ◽  
Voltage Scanning

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

High-Efficiency Three-Dimensional Visualization of Complex Microstructures via Multidimensional STEM Acquisition and Reconstruction

2020 ◽  
Vol 26 (2) ◽  
pp. 240-246 ◽  
Author(s):  
Kevin G. Field ◽  
Benjamin P. Eftink ◽  
Chad M. Parish ◽  
Stuart A. Maloy
Keyword(s):  
High Efficiency ◽  
3D Visualization ◽  
Accurate Determination ◽  
Three Dimensional ◽  
High Energy ◽  
Scanning Transmission Electron Microscope ◽  
Chromium Steel ◽  
Transmission Electron ◽  
Scanning Transmission

AbstractComplex material systems in which microstructure and microchemistry are nonuniformly dispersed require three-dimensional (3D) rendering(s) to provide an accurate determination of the physio-chemical nature of the system. Current scanning transmission electron microscope (STEM)-based tomography techniques enable 3D visualization but can be time-consuming, so only select systems or regions are analyzed in this manner. Here, it is presented that through high-efficiency multidimensional STEM acquisition and reconstruction, complex point cloud-like microstructural features can quickly and effectively be reconstructed in 3D. The proposed set of techniques is demonstrated, analyzed, and verified for a high-chromium steel with heterogeneously situated features induced using high-energy neutron bombardment.

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