Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
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2019 ◽
Vol 40
(1)
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pp. 012806
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2020 ◽
Vol 38
(2)
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pp. 022404
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2004 ◽
Vol 374
(1-2)
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pp. 124-128
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2014 ◽
Vol 20
(7-8-9)
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pp. 217-223
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