Abstract. To fulfil today's requirements, gas sensors have to
become more and more sensitive and selective. Temperature-cycled operation
has long been used to enhance the sensitivity and selectivity of metal-oxide
semiconductor gas sensors and, more recently, silicon-carbide-based,
gas-sensitive field-effect transistors (SiC-FETs). In this work, we present a
novel method to significantly enhance the effect of gate bias on a SiC-FET's
response, giving rise to new possibilities for static and transient signal
generation and, thus, increased sensitivity and selectivity. A tungsten
trioxide (WO3) layer is deposited via pulsed laser deposition as an oxide
layer beneath a porous iridium gate, and is doped with 0.1 AT % of lithium
cations. Tests with ammonia as a well-characterized model gas show a
relaxation effect with a time constant between 20 and 30 s after a gate bias
step as well as significantly increased response and sensitivity at +2 V
compared to 0 V. We propose an electric field-mediated change in oxygen
surface coverage as the cause of this novel effect.