Fourier Transform Infrared Study on Hydrogen Bonding Species of Carboxylic Acids in Supercritical Carbon Dioxide with Ethanol

1999 ◽  
Vol 103 (18) ◽  
pp. 3525-3529 ◽  
Author(s):  
Morio Yamamoto ◽  
Yoshio Iwai ◽  
Taro Nakajima ◽  
Yasuhiko Arai
2004 ◽  
Vol 812 ◽  
Author(s):  
Bo Xie ◽  
Anthony J. Muscat

AbstractPorous methylsilsesquioxane (p-MSQ) films (JSR LKD 5109) were treated with alkyldimethylmonochlorosilanes having chain lengths of one, four, and eight carbon atoms dissolved in supercritical carbon dioxide at 150-300 atm and 50-60°C to repair oxygen ashing damage. Fourier transform infrared (FTIR) spectroscopy showed that trimethylchlorosilane (TMCS), butyldimethylchlorosilane (BDMCS), and octyldimethylchlorosilane (ODMCS) reacted with silanol groups on the surfaces of the pores producing covalent Si-O-Si bonds. Selfcondensation between alkylsilanols produced a residue on the surface, which was partially removed using a pure scCO2 rinse. The hydrophobicity of the blanket p-MSQ surface was recovered after silylation treatment as shown by contact angles >85°. The initial dielectric constant of 2.4 ± 0.1 increased to 3.5 ± 0.1 after oxygen plasma ashing and was reduced to 2.6 ± 0.1 by TMCS, 2.8 ± 0.1 by BDMCS, and 3.2 by ODMCS.


1999 ◽  
Vol 16 (1) ◽  
pp. 111-117 ◽  
Author(s):  
Poongunran Muthukumaran ◽  
Ram B. Gupta ◽  
Hwan-Do Sung ◽  
Jae-Jin Shim ◽  
Hyo-Kwang Bae

2010 ◽  
Vol 55 (11) ◽  
pp. 4922-4927 ◽  
Author(s):  
Darrell L. Sparks ◽  
L. Antonio Estévez ◽  
Rafael Hernandez ◽  
Jason McEwen ◽  
Todd French

1999 ◽  
Vol 32 (9) ◽  
pp. 3118-3121 ◽  
Author(s):  
J. de Groot ◽  
J. G. Hollander ◽  
L. H. Leyte-Zuiderweg ◽  
J. de Bleijser

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