Atomic layer deposition of epitaxial CeO2 thin layers for faster surface hydrogen oxidation and faster bulk ceria reduction/reoxidation

2015 ◽  
Vol 3 (19) ◽  
pp. 10498-10503 ◽  
Author(s):  
Adrien Marizy ◽  
Pascal Roussel ◽  
Armelle Ringuedé ◽  
Michel Cassir
Keyword(s):  
Atomic Layer Deposition ◽  
Single Crystal ◽  
Hydrogen Oxidation ◽  
Atomic Layer ◽  
Thin Layers ◽  
Surface Hydrogen ◽  
Layer Deposition ◽  
Ceria Reduction

Thin ceria layers of 120 nm were processed by atomic layer deposition on both YSZ(100) single crystal substrates and polycrystalline YSZ ones.

Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO3 on GaAs(111)A Using Laminated Atomic Layer Deposition

2019 ◽  
Vol 19 (4) ◽  
pp. 2030-2036 ◽  
Author(s):  
Lawrence Boyu Young ◽  
Chao-Kai Cheng ◽  
Keng-Yung Lin ◽  
Yen-Hsun Lin ◽  
Hsien-Wen Wan ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Single Crystal ◽  
Atomic Layer ◽  
High Quality ◽  
High Quality Single Crystal ◽  
Layer Deposition

Crystallization of Amorphous Si Thin Films Using Sub-nm Nickel Oxide Thin Layers Deposited by Atomic Layer Deposition

2019 ◽  
Vol 3 (15) ◽  
pp. 279-282 ◽  
Author(s):  
Byung Soo So ◽  
Wontae Cho ◽  
Yil-Hwan You ◽  
Jin-Ha Hwang ◽  
Sun Sook Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Nickel Oxide ◽  
Atomic Layer ◽  
Thin Layers ◽  
Layer Deposition ◽  
Amorphous Si

Heteroepitaxy of single-crystal LaLuO3 on GaAs(111)A by atomic layer deposition

2010 ◽  
Vol 97 (16) ◽  
pp. 162910 ◽  
Author(s):  
Yiqun Liu ◽  
Min Xu ◽  
Jaeyeong Heo ◽  
Peide D. Ye ◽  
Roy G. Gordon
Keyword(s):  
Atomic Layer Deposition ◽  
Single Crystal ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Single-Crystal Y2O3 Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition

Materials ◽  
2015 ◽  
Vol 8 (10) ◽  
pp. 7084-7093 ◽  
Author(s):  
Y. Lin ◽  
C. Cheng ◽  
K. Chen ◽  
C. Fu ◽  
T. Chang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Single Crystal ◽  
Atomic Layer ◽  
Layer Deposition
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