scholarly journals Spectroscopic characterization of a low-temperature plasma ambient ionization probe operated with helium/nitrogen plasma gas mixtures

2016 ◽  
Vol 31 (8) ◽  
pp. 1574-1581 ◽  
Author(s):  
Andriy Kuklya ◽  
Carsten Engelhard ◽  
Klaus Kerpen ◽  
Ursula Telgheder
Keyword(s):  
Low Temperature ◽  
Spectroscopic Characterization ◽  
Gas Mixtures ◽  
Ambient Ionization ◽  
Nitrogen Plasma ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Ionization Probe

In this study, a systematic spectroscopic characterization of a low-temperature plasma (LTP) probe operated with He/N2 gas mixtures is carried out.

Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications

2018 ◽  
Vol 2018 (1) ◽  
pp. 000728-000733
Author(s):  
Piotr Mackowiak ◽  
Rachid Abdallah ◽  
Martin Wilke ◽  
Jash Patel ◽  
Huma Ashraf ◽  
...  
Keyword(s):  
Low Temperature ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Charge Densities ◽  
Doped Silicon

Abstract In the present work we investigate the quality of low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) and plasma treated Tetraethyl orthosilicate (TEOS)-based TSV-liner films. Different designs of Trough Silicon Via (TSV) Test structures with 10μm and 20μm width and a depth of 100μm have been fabricated. Two differently doped silicon substrates have been used – highly p-doped and moderately doped. The results for break-through, resistivity and capacitance for the 20μm structures show a better performance compared to the 10μm structures. This is mainly due to increased liner thickness in the reduced aspect ratio case. Lower interface traps and oxide charge densities have been observed in the C-V measurements results for the 10μm structures.

Screening of agrochemicals in foodstuffs using low-temperature plasma (LTP) ambient ionization mass spectrometry

The Analyst ◽  
2010 ◽  
Vol 135 (5) ◽  
pp. 971 ◽  
Author(s):  
Joshua S. Wiley ◽  
Juan F. García-Reyes ◽  
Jason D. Harper ◽  
Nicholas A. Charipar ◽  
Zheng Ouyang ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Low Temperature ◽  
Ambient Ionization ◽  
Ionization Mass Spectrometry ◽  
Ionization Mass ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Ambient Ionization Mass Spectrometry

scholarly journals Multi‐technique characterization of low‐temperature plasma nitrided austenitic AISI 304L and AISI 904L stainless steel

2014 ◽  
Vol 46 (10-11) ◽  
pp. 856-860 ◽  
Author(s):  
Y. Cao ◽  
G. Maistro ◽  
M. Norell ◽  
S. A. Pérez‐Garcia ◽  
L. Nyborg
Keyword(s):  
Stainless Steel ◽  
Low Temperature ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Aisi 304L

Direct olive oil analysis by low-temperature plasma (LTP) ambient ionization mass spectrometry

2009 ◽  
Vol 23 (19) ◽  
pp. 3057-3062 ◽  
Author(s):  
Juan F. García-Reyes ◽  
Fabio Mazzoti ◽  
Jason D. Harper ◽  
Nicholas A. Charipar ◽  
Sheran Oradu ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Low Temperature ◽  
Olive Oil ◽  
Ambient Ionization ◽  
Ionization Mass ◽  
Oil Analysis ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Ambient Ionization Mass Spectrometry ◽  
Olive Oil Analysis
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