Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
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In this paper, AlNO nano-films have been deposited on an AlGaN/GaN heterojunction by alternating growth of AlN and Al2O3 using plasma enhanced atomic layer deposition (PEALD).
2020 ◽
Vol 14
(6)
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pp. 2000083
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2017 ◽
Vol 29
(5)
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pp. 2046-2054
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