Low energy electron-induced decomposition of (η3-C3H5)Ru(CO)3Br, a potential focused electron beam induced deposition precursor with a heteroleptic ligand set

2017 ◽  
Vol 19 (20) ◽  
pp. 13264-13271 ◽  
Author(s):  
Rachel M. Thorman ◽  
Joseph A. Brannaka ◽  
Lisa McElwee-White ◽  
Oddur Ingólfsson
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron ◽  
Electron Beam Induced Deposition ◽  
Induced Decomposition

Low energy electron induced fragmentation of (η3-C3H5)Ru(CO)3Br is reported in relation to the suitability of different ligands in the design of focused electron beam induced deposition precursors.

Low energy electron-induced decomposition of (η5-Cp)Fe(CO)2Mn(CO)5, a potential bimetallic precursor for focused electron beam induced deposition of alloy structures

2018 ◽  
Vol 20 (8) ◽  
pp. 5644-5656 ◽  
Author(s):  
Rachel M. Thorman ◽  
Ilyas Unlu ◽  
Kelsea Johnson ◽  
Ragnar Bjornsson ◽  
Lisa McElwee-White ◽  
...  
Keyword(s):  
Electron Beam ◽  
Gas Phase ◽  
Quantum Chemical Calculations ◽  
Quantum Chemical ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron ◽  
Electron Beam Induced Deposition ◽  
Induced Decomposition

Low energy electron-induced decomposition of a potential bimetallic nanofabrication precursor is studied in gas-phase, at surfaces and by quantum chemical calculations.

scholarly journals Response under low-energy electron irradiation of a thin film of a potential copper precursor for focused electron beam induced deposition (FEBID)

2018 ◽  
Vol 9 ◽  
pp. 57-65 ◽  
Author(s):  
Leo Sala ◽  
Iwona B Szymańska ◽  
Céline Dablemont ◽  
Anne Lafosse ◽  
Lionel Amiaud
Keyword(s):  
Electron Beam ◽  
Cross Section ◽  
Electron Irradiation ◽  
High Vacuum ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron ◽  
Amine Ligands ◽  
Electron Beam Induced Deposition ◽  
The Cross

Background: Focused electron beam induced deposition (FEBID) allows for the deposition of free standing material within nanometre sizes. The improvement of the technique needs a combination of new precursors and optimized irradiation strategies to achieve a controlled fragmentation of the precursor for leaving deposited material of desired composition. Here a new class of copper precursors is studied following an approach that probes some surface processes involved in the fragmentation of precursors. We use complexes of copper(II) with amines and perfluorinated carboxylate ligands that are solid and stable under ambient conditions. They are directly deposited on the surface for studying the fragmentation with surface science tools. Results: Infrared spectroscopy and high-resolution electron energy loss spectroscopy (HREELS) are combined to show that the precursor is able to spontaneously lose amine ligands under vacuum. This loss can be enhanced by mild heating. The combination of mass spectrometry and low-energy electron irradiation (0–15 eV) shows that full amine ligands can be released upon irradiation, and that fragmentation of the perfluorinated ligands is induced by electrons of energy as low as 1.5 eV. Finally, the cross section for this process is estimated from the temporal evolution in the experiments on electron-stimulated desorption (ESD). Conclusion: The release of full ligands under high vacuum and by electron irradiation, and the cross section measured here for ligands fragmentation allow one to envisage the use of the two precursors for FEBID studies.

scholarly journals Dose-rate effect of low-energy electron beam irradiation on bacterial content in chilled turkey

2021 ◽  
Vol 640 (3) ◽  
pp. 032006
Author(s):  
U A Bliznyuk ◽  
P Yu Borchegovskaya ◽  
A P Chernyaev ◽  
V S Ipatova ◽  
V A Leontiev ◽  
...  
Keyword(s):  
Electron Beam ◽  
Dose Rate ◽  
Electron Beam Irradiation ◽  
Rate Effect ◽  
Low Energy ◽  
Energy Electron ◽  
Beam Irradiation ◽  
Low Energy Electron ◽  
Bacterial Content ◽  
Dose Rate Effect

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron
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