Modifying the electrochemical performance of vertically-oriented few-layered graphene through rotary plasma processing

2018 ◽  
Vol 6 (3) ◽  
pp. 908-917 ◽  
Author(s):  
Jinghuang Lin ◽  
Henan Jia ◽  
Yifei Cai ◽  
Shulin Chen ◽  
Haoyan Liang ◽  
...  
Keyword(s):  
Electrochemical Performance ◽  
Plasma Etching ◽  
Plasma Processing ◽  
Defect Engineering

We strategically created defects on the side surfaces of VFG via defect engineering using rotary plasma etching, which not only improves the wettability with electrolyte, but also provides more electroactive sites.

Defect-promoted photo-electrochemical performance enhancement of orange-luminescent ZnO nanorod-arrays

2017 ◽  
Vol 19 (19) ◽  
pp. 12255-12268 ◽  
Author(s):  
Jan Kegel ◽  
Fathima Laffir ◽  
Ian M. Povey ◽  
Martyn E. Pemble
Keyword(s):  
Electrochemical Performance ◽  
Performance Enhancement ◽  
Zno Nanorod ◽  
Nanorod Arrays ◽  
Zno Nanorod Arrays ◽  
Defect Engineering

Defect engineering in ZnO: origin of strong orange-luminescent defects in solution-grown nanorod-arrays and their enhanced photo-electrochemical performance.

Single- and Multi-Directional Slanted Plasma Etching of Silicon under Practical Plasma Processing Conditions

2014 ◽  
Vol 3 (11) ◽  
pp. Q215-Q220 ◽  
Author(s):  
Sung-Woon Cho ◽  
Jun-Hyun Kim ◽  
Doo Won Kang ◽  
Kangtaek Lee ◽  
Chang-Koo Kim
Keyword(s):  
Plasma Etching ◽  
Plasma Processing ◽  
Processing Conditions

scholarly journals Structural and defect engineering of cobaltosic oxide nanoarchitectures as an ultrahigh energy density and super durable cathode for Zn-based batteries

2019 ◽  
Vol 10 (32) ◽  
pp. 7600-7609 ◽  
Author(s):  
Chunlin Teng ◽  
Fan Yang ◽  
Minghui Sun ◽  
Keshu Yin ◽  
Qintong Huang ◽  
...  
Keyword(s):  
Energy Density ◽  
Oxygen Vacancy ◽  
Electrochemical Performance ◽  
Cycling Stability ◽  
Ultrahigh Energy ◽  
Defect Engineering ◽  
Ordered Mesoporous ◽  
Cobaltosic Oxide

Ordered mesoporous and oxygen-vacancy are demonstrated to significantly improve the electrochemical performance of Co3O4. Capitalizing on the optimized M-Co3O4−x cathode, the ZBB exhibits ultrahigh energy density and extraordinary cycling stability.

Controlling microstructure and electrochemical performance of TiO2 film by defect engineering

2020 ◽  
Vol 46 (4) ◽  
pp. 5387-5393
Author(s):  
Zhitong Hu ◽  
Ju Rong ◽  
Zhaolin Zhan ◽  
Xiaohua Yu
Keyword(s):  
Electrochemical Performance ◽  
Tio2 Film ◽  
Defect Engineering

Remote Plasma Etching of Backend Semiconductor Materials for Reliable Packaging

2021 ◽  
Vol 314 ◽  
pp. 312-317
Author(s):  
Rogier Evertsen ◽  
Nicolle Beckers ◽  
Shao Ying Wang ◽  
Richard van der Stam
Keyword(s):  
Process Parameters ◽  
Plasma Etching ◽  
Plasma Processing ◽  
Semiconductor Materials ◽  
Material Strength ◽  
Remote Plasma ◽  
Advanced Packaging ◽  
Die Material ◽  
Silicon Based ◽  
Laser Separation

This paper describes a study on the remote plasma etching of silicon-based semiconductor wafers after laser separation. Several process parameters having impact on the chip reliability, expressed as changes in die material strength, have been studied and optimized. The results show the potential of fluorine-based plasma processing for cleaning dies and improving die performance and thus have a role as a process enabling advanced packaging technologies.

Sign in / Sign up

Export Citation Format

Share Document