Single- and Multi-Directional Slanted Plasma Etching of Silicon under Practical Plasma Processing Conditions

2014 ◽  
Vol 3 (11) ◽  
pp. Q215-Q220 ◽  
Author(s):  
Sung-Woon Cho ◽  
Jun-Hyun Kim ◽  
Doo Won Kang ◽  
Kangtaek Lee ◽  
Chang-Koo Kim
Keyword(s):  
Plasma Etching ◽  
Plasma Processing ◽  
Processing Conditions

Mapping of wafer profile to plasma processing conditions: Forward and reverse maps

2000 ◽  
Vol 18 (1) ◽  
pp. 299 ◽  
Author(s):  
Jennifer Lane ◽  
Edward A. Rietman ◽  
Nace Layadi ◽  
John T. C. Lee
Keyword(s):  
Plasma Processing ◽  
Processing Conditions

Modifying the electrochemical performance of vertically-oriented few-layered graphene through rotary plasma processing

2018 ◽  
Vol 6 (3) ◽  
pp. 908-917 ◽  
Author(s):  
Jinghuang Lin ◽  
Henan Jia ◽  
Yifei Cai ◽  
Shulin Chen ◽  
Haoyan Liang ◽  
...  
Keyword(s):  
Electrochemical Performance ◽  
Plasma Etching ◽  
Plasma Processing ◽  
Defect Engineering

We strategically created defects on the side surfaces of VFG via defect engineering using rotary plasma etching, which not only improves the wettability with electrolyte, but also provides more electroactive sites.

Hydrophilic Finishing for Polyester Fabric Using Plasma and Chitosan

2020 ◽  
Vol 980 ◽  
pp. 154-161
Author(s):  
Wei Yin ◽  
Yan Wang
Keyword(s):  
Molecular Weight ◽  
Environmental Protection ◽  
Plasma Processing ◽  
Polyester Fabric ◽  
Clothing Industry ◽  
Low Molecular Weight ◽  
Processing Conditions ◽  
Processing Effect ◽  
Orthogonal Experiments ◽  
Variation Tendency

Polyester fabric has the disadvantage of poor hydrophilicity which reduces its wearing comfort and limits its usage in clothing industry. Chitosan especially that of low molecular weight is effective in hydrophilic finishing for polyester fabric, while using plasma processing can greatly improve the effect. This is a green and environmental protection process. Two sets of orthogonal experiments and analysis are done to research the factors that influence the plasma processing effect and the chitosan finishing effect which points out the variation tendency and the best processing conditions.

scholarly journals Bulk molybdenum field emitters by inductively coupled plasma etching

2016 ◽  
Vol 18 (48) ◽  
pp. 33152-33157 ◽  
Author(s):  
Ningli Zhu ◽  
Matthew T. Cole ◽  
William I. Milne ◽  
Jing Chen
Keyword(s):  
Plasma Etching ◽  
Electron Emission ◽  
Inductively Coupled Plasma ◽  
Field Electron Emission ◽  
Processing Conditions ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Field Emitters ◽  
Field Electron

Processing conditions are herein explored for the etching of bulk Mo by inductively coupled plasma towards nano tip arrays for field electron emission applications.

Remote Plasma Etching of Backend Semiconductor Materials for Reliable Packaging

2021 ◽  
Vol 314 ◽  
pp. 312-317
Author(s):  
Rogier Evertsen ◽  
Nicolle Beckers ◽  
Shao Ying Wang ◽  
Richard van der Stam
Keyword(s):  
Process Parameters ◽  
Plasma Etching ◽  
Plasma Processing ◽  
Semiconductor Materials ◽  
Material Strength ◽  
Remote Plasma ◽  
Advanced Packaging ◽  
Die Material ◽  
Silicon Based ◽  
Laser Separation

This paper describes a study on the remote plasma etching of silicon-based semiconductor wafers after laser separation. Several process parameters having impact on the chip reliability, expressed as changes in die material strength, have been studied and optimized. The results show the potential of fluorine-based plasma processing for cleaning dies and improving die performance and thus have a role as a process enabling advanced packaging technologies.

The effects of plasma-processing conditions on the morphology of adherent human blood platelets

2008 ◽  
Vol 103 (9) ◽  
pp. 093302 ◽  
Author(s):  
R. Murugesan ◽  
E. Hanley ◽  
R. M. Albrecht ◽  
J. A. Oliver ◽  
J. A. Heintz ◽  
...  
Keyword(s):  
Human Blood ◽  
Blood Platelets ◽  
Plasma Processing ◽  
Processing Conditions ◽  
Human Blood Platelets
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