Precision high temperature sensors often require temperature compensation. Quartzdyne pressure transducers use a temperature sensitive quartz crystal for compensation. In an effort to shrink transducer packaging, and increase reliability; a prototype frequency output temperature sensor was designed using a 0.8um silicon bulk CMOS process.
The 250°C operational sensor is based on a PTAT current generator. The design uses high temperature design techniques that were proven reliable in prior Quartzdyne ASIC's. The output frequency is 34kHz at 30°C, with a sensitivity of 100Hz/°C and achievable accuracy of ±0.3°C from 25°C to 200°C. This paper will review the sensor's characteristics, including the output linearity, hysteresis, accelerated aging and temperature cycling to demonstrate the performance and long term reliability and repeatability of the sensor.