Study of the growth mechanism of CVD silicon films on silica by X-ray reflectivity, atomic force microscopy and scanning electron microscopy
1999 ◽
Vol 09
(PR8)
◽
pp. Pr8-157-Pr8-164
◽
2008 ◽
Vol 391
(4)
◽
pp. 1351-1359
◽
2008 ◽
Vol 8
(8)
◽
pp. 4127-4131
◽
2008 ◽
Vol 8
(4)
◽
pp. 1757-1761
◽
1999 ◽
Vol 17
(1)
◽
pp. 176-182
◽
2019 ◽
Vol 946
◽
pp. 235-241
◽
2014 ◽
Vol 775-776
◽
pp. 465-470