SCANNING ELECTRON ACOUSTIC MICROSCOPY WITH SUBNANOSECOND TIME RESOLUTION

1984 ◽  
Vol 45 (C2) ◽  
pp. C2-873-C2-876 ◽  
Author(s):  
L. J. Balk ◽  
N. Kultscher
1996 ◽  
Vol 99 (11) ◽  
pp. 853-857 ◽  
Author(s):  
Shuwei Li ◽  
Fuming Jiang ◽  
Qingrui Yin ◽  
Yixin Jin

Author(s):  
L. Meng ◽  
J.C.H. Phang ◽  
A.G. Street

Abstract The capability of the Scanning Electron Acoustic Microscopy (SEAM) technique for high resolution non-destructive subsurface imaging at different depths for a multi-level integrated circuit is assessed. Experimental results using a beveled DRAM IC sample are used to quantify the effect of the electron beam energy and modulation frequency on contrast, spatial resolution and depth of focus of SEAM amplitude and phase images.


2009 ◽  
Vol 24 (7) ◽  
pp. 2173-2178 ◽  
Author(s):  
Hongzhang Song ◽  
Yongxiang Li ◽  
Kunyu Zhao ◽  
Huarong Zeng ◽  
Guorong Li ◽  
...  

In this paper, the responses in the microregion of three ferroic-type materials, such as ferroelectric single crystals (PMN-PT and BaTiO3), ferromagnetic alloy (Fe81Ga19), and ferroelastic alloy (Ni53Mn24Ga23), to local stress induced by Vickers indentations were studied using scanning electron-acoustic microscopy (SEAM), a powerful technique for nondestructive investigation of the microstructure of materials. The responses of ferroelectric domains, magnetic domains, and ferroelastic domains to local stress were successfully observed. These responses possess three major features including the plastic deformation underneath the indenter, the extension of microcracks induced by indentation, and the formation of new lamellar domains within the matrix domain structure. In addition, by using the unique ability of SEAM to image layer by layer, the distributions of residual stress at different depths were obtained. The generation mechanisms of the electron acoustic signals of ferroelectric domains, magnetic domains, and ferroelastic domains are discussed.


2006 ◽  
pp. 273-278
Author(s):  
Y. Hong ◽  
Z. N. Zhang ◽  
S. Y. Zhang ◽  
Z. Q. Li ◽  
X. J. Shui

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