scholarly journals X rays in electron‐cyclotron‐resonance processing plasmas

1992 ◽  
Vol 60 (23) ◽  
pp. 2856-2858 ◽  
Author(s):  
T. J. Castagna ◽  
J. L. Shohet ◽  
D. D. Denton ◽  
N. Hershkowitz
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
X Rays

Soft X-rays generated by the electron-cyclotron resonance discharge in heavy gases sustained by a high-power microwave beam in a magnetic trap

2000 ◽  
Vol 26 (12) ◽  
pp. 1075-1077 ◽  
Author(s):  
A. V. Vodopyanov ◽  
S. V. Golubev ◽  
V. G. Zorin ◽  
A. Yu. Kryachko ◽  
A. Ya. Lopatin ◽  
...  
Keyword(s):  
High Power ◽  
Cyclotron Resonance ◽  
Magnetic Trap ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
X Rays ◽  
High Power Microwave ◽  
Microwave Beam ◽  
Power Microwave

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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