ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Maximum x-ray energy from compact electron cyclotron resonance based source of x rays
Review of Scientific Instruments
◽
10.1063/1.1480456
◽
2002
◽
Vol 73
(6)
◽
pp. 2287-2291
◽
Cited By ~ 10
Author(s):
C. Rouillé
◽
K. Serebrennikov
◽
M. Bacal
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Electron Cyclotron
◽
X Rays
◽
X Ray
Download Full-text
Related Documents
Cited By
References
X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)
Applied Surface Science
◽
10.1016/0169-4332(93)90239-8
◽
1993
◽
Vol 68
(4)
◽
pp. 575-582
◽
Cited By ~ 20
Author(s):
M. Diani
◽
J.L. Bischoff
◽
L. Kubler
◽
D. Bolmont
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Electron Cyclotron
◽
Electron Cyclotron Resonance Plasma
◽
X Ray
◽
Photoelectron Diffraction
◽
Resonance Plasma
Download Full-text
X rays in electron‐cyclotron‐resonance processing plasmas
Applied Physics Letters
◽
10.1063/1.106846
◽
1992
◽
Vol 60
(23)
◽
pp. 2856-2858
◽
Cited By ~ 5
Author(s):
T. J. Castagna
◽
J. L. Shohet
◽
D. D. Denton
◽
N. Hershkowitz
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Electron Cyclotron
◽
X Rays
Download Full-text
Experimental studies on a compact electron cyclotron resonance plasma x-ray source
Review of Scientific Instruments
◽
10.1063/1.1149821
◽
1999
◽
Vol 70
(6)
◽
pp. 2637-2645
◽
Cited By ~ 15
Author(s):
R. Baskaran
◽
T. S. Selvakumaran
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Experimental Studies
◽
Electron Cyclotron
◽
Electron Cyclotron Resonance Plasma
◽
X Ray
◽
Resonance Plasma
Download Full-text
X‐ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
Applied Physics Letters
◽
10.1063/1.103607
◽
1990
◽
Vol 57
(6)
◽
pp. 590-592
◽
Cited By ~ 6
Author(s):
A. S. Yapsir
◽
G. S. Oehrlein
◽
G. Fortuño‐Wiltshire
◽
J. C. Tsang
Keyword(s):
Raman Scattering
◽
Spectroscopic Study
◽
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Surface Modifications
◽
Electron Cyclotron
◽
X Ray
Download Full-text
SiC x-ray lithography mask fabricated by electron cyclotron resonance plasma source coupled with divided microwaves
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.589378
◽
1997
◽
Vol 15
(3)
◽
pp. 736
◽
Cited By ~ 2
Author(s):
Masaru Shimada
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Plasma Source
◽
Electron Cyclotron
◽
Electron Cyclotron Resonance Plasma
◽
X Ray
◽
Resonance Plasma
Download Full-text
Measurement of ion charge state distributions inside electron cyclotron resonance neon and chlorine plasmas by x-ray spectroscopy (abstract)
Review of Scientific Instruments
◽
10.1063/1.1149228
◽
1998
◽
Vol 69
(2)
◽
pp. 1203-1203
Author(s):
P. Grübling
◽
D. Küchler
◽
A. Ullrich
◽
T. Werner
◽
G. Zschornack
Keyword(s):
Charge State
◽
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Electron Cyclotron
◽
X Ray
◽
Charge State Distributions
Download Full-text
Ultrahigh-Vacuum Electron Cyclotron Resonance-Plasma Chemical-Vapor-DepositedSiNxFilms for X-Ray Lithography Mask Membrane: As-Deposited Properties and Radiation Stability
Japanese Journal of Applied Physics
◽
10.1143/jjap.33.6908
◽
1994
◽
Vol 33
(Part 1, No. 12B)
◽
pp. 6908-6912
◽
Cited By ~ 1
Author(s):
Jinho Ahn
◽
Katsumi Suzuki
◽
Shinji Tsuboi
◽
Yoshio Yamashita
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Ultrahigh Vacuum
◽
Chemical Vapor
◽
Radiation Stability
◽
Electron Cyclotron
◽
Plasma Chemical
◽
Electron Cyclotron Resonance Plasma
◽
X Ray
◽
Resonance Plasma
Download Full-text
Pulse height analysis using Si-pin diode of x-ray irradiated from a 2.45 GHz electron cyclotron resonance multicharged ion source
Review of Scientific Instruments
◽
10.1063/1.1148659
◽
1998
◽
Vol 69
(2)
◽
pp. 1179-1181
◽
Cited By ~ 10
Author(s):
Yushi Kato
◽
Yoshiyuki Kubo
◽
Shigeyuki Ishii
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Pulse Height
◽
Ion Source
◽
Electron Cyclotron
◽
Pin Diode
◽
X Ray
◽
Pulse Height Analysis
Download Full-text
X‐ray and vacuum ultraviolet imaging for electron cyclotron resonance processing plasmas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.578491
◽
1993
◽
Vol 11
(4)
◽
pp. 1186-1192
◽
Cited By ~ 3
Author(s):
K. H. Chew
◽
J. L. Shohet
◽
T. J. Castagna
◽
K. L. Seaward
◽
F. F. Mertz
Keyword(s):
Cyclotron Resonance
◽
Vacuum Ultraviolet
◽
Electron Cyclotron Resonance
◽
Electron Cyclotron
◽
X Ray
Download Full-text
Two-slope soft X-ray spectra observed in experiments on electron cyclotron resonance plasma heating in the L-2M stellarator
Plasma Physics Reports
◽
10.1134/s1063780x17060113
◽
2017
◽
Vol 43
(6)
◽
pp. 599-604
◽
Cited By ~ 5
Author(s):
A. I. Meshcheryakov
◽
I. Yu. Vafin
◽
I. A. Grishina
◽
A. A. Letunov
◽
M. A. Tereshchenko
Keyword(s):
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Plasma Heating
◽
Electron Cyclotron
◽
Electron Cyclotron Resonance Plasma
◽
X Ray
◽
Resonance Plasma
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close