Exploration of the afterglow of the pulsed electron cyclotron resonance source under the injection of neutral fluxes

Review of Scientific Instruments ◽

10.1063/1.1148645 ◽

1998 ◽

Vol 69 (2) ◽

pp. 1129-1131 ◽

Author(s):

V. Mironov ◽

G. Shirkov ◽

O. Strekalovsky ◽

N. Tokareva

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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CALIBRATION OF HIGH MAGNETIC FIELDS USING FREE ELECTRON CYCLOTRON RESONANCE IN A PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19841196 ◽

1984 ◽

Vol 45 (C1) ◽

pp. C1-961-C1-963

Author(s):

J. C. Maan ◽

H.-J. Schneider Muntau ◽

A. Dorelon

Keyword(s):

Magnetic Fields ◽

Free Electron ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Magnetic Fields

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MBE grown Npn AlGaAs/GaAs bipolar transistors with C p doping by electron cyclotron resonance source activated methane

Electronics Letters ◽

10.1049/el:19910293 ◽

1991 ◽

Vol 27 (5) ◽

pp. 465 ◽

Author(s):

G. Liu ◽

D. Mui ◽

S. Fang ◽

G. Gao ◽

H. Morkoç

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bipolar Transistors ◽

Electron Cyclotron

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Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

Electronics Letters ◽

10.1049/el:19940006 ◽

1994 ◽

Vol 30 (1) ◽

pp. 84-85 ◽

Author(s):

R.J. Shul ◽

D.J. Rieger ◽

C. Constantine ◽

A.G. Baca ◽

C. Barratt

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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Characterization and optimization of electron cyclotron resonance ion source

IET-UK International Conference on Information and Communication Technology in Electrical Sciences (ICTES 2007) ◽

10.1049/ic:20070703 ◽

2007 ◽

Author(s):

R. Henry

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance charge breeder plasma parameters from the modeling of 1+ beam stopping

Physical Review Accelerators and Beams ◽

10.1103/physrevaccelbeams.24.073403 ◽

2021 ◽

Vol 24 (7) ◽

Author(s):

A. Annaluru ◽

P. Delahaye ◽

M. Dubois ◽

L. Maunoury

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Parameters ◽

Charge Breeder ◽

Resonance Charge

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ECRIT: An Electron Cyclotron Resonance Ion Trap for Stable and Radioactive Ions Injectors, Accumulators and Targets

Nuclear Physics News ◽

10.1080/10506899909411119 ◽

1999 ◽

Vol 9 (2) ◽

pp. 17-21

Author(s):

R. Geller

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Trap ◽

Electron Cyclotron ◽

Radioactive Ions

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Effect of decamethylcyclopentasiloxane and trifluoromethane electron cyclotron resonance plasmas on F–SiCOH low dielectric constant film deposition

Journal of Applied Physics ◽

10.1063/1.3159880 ◽

2009 ◽

Vol 106 (1) ◽

pp. 013302 ◽

Author(s):

Chao Ye ◽

Haiyan Zhang ◽

Zhaoyuan Ning

Keyword(s):

Dielectric Constant ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Low Dielectric Constant ◽

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Effect of double frequency heating on the lead afterglow beam currents of an electron cyclotron resonance ion source

Physical Review Accelerators and Beams ◽

10.1103/physrevaccelbeams.20.103402 ◽

2017 ◽

Vol 20 (10) ◽

Author(s):

V. Toivanen ◽

G. Bellodi ◽

D. Küchler ◽

F. Wenander ◽

O. Tarvainen

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Double Frequency ◽

Beam Currents ◽

Frequency Heating

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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