Ambient gas effects on debris formed during KrF laser ablation of polyimide

1992 ◽  
Vol 60 (13) ◽  
pp. 1633-1635 ◽  
Author(s):  
Stephan Küper ◽  
James Brannon
Keyword(s):  
1990 ◽  
Vol 191 ◽  
Author(s):  
Akiharu Morimoto ◽  
Shigeru Otsubo ◽  
Tatsuo Shimizu ◽  
Toshiharu Minamikawa ◽  
Yasuto Yonezawa ◽  
...  

ABSTRACTPb(Zr0.52Ti0. 48)O3 (PZT) films were prepared on r-plane sapphire substrates by the laser ablation method utilizing ArF excimer laser in O2 or N2O environment. The composition of the films deposited in O2 environment was found to be fairly close to the composition of the target material for a wide range of substrate temperatures, 400 – 750 °c. Increasing the laser fluence (the laser power density) for the ablation enhances the formation of the perovskite structure rather than the pyrochlore one. Use of N2O ambient gas instead of O2 gas enhances the formation of the perovskite structure of PZT films. Furthermore, it was found that a laser irradiation on the growing film surface during deposition enhances the formation of the perovskite structure.


2007 ◽  
Vol 59 ◽  
pp. 543-547 ◽  
Author(s):  
S Lazare ◽  
V N Tokarev ◽  
A Sionkowska ◽  
M Wiśniewski

2000 ◽  
Vol 154-155 ◽  
pp. 66-72 ◽  
Author(s):  
A.V. Gusarov ◽  
A.G. Gnedovets ◽  
I. Smurov

1999 ◽  
Vol 14 (2) ◽  
pp. 359-370 ◽  
Author(s):  
Douglas H. Lowndes ◽  
Christopher M. Rouleau ◽  
T.G. Thundat ◽  
G. Duscher ◽  
E.A. Kenik ◽  
...  

The size distributions of Si and ZnTe nanoparticles produced by low energy density ArF (193 nm) pulsed laser ablation into ambient gases were measured as a function of the gas pressure, P, and target-substrate separation, Dts. For both Si and ZnTe, the largest nanoparticles were found closest to the ablation target, and the mean nanoparticle size decreased with increasing Dts. For Si ablation into He, the mean nanoparticle diameter did not increase monotonically with gas pressure but reached a maximum near P = 6 Torr. High resolution Z-contrast transmission electron microscopy and energy loss spectroscopy revealed that ZnTe nanoparticles consist of a crystalline core surrounded by an amorphous ZnO shell; growth defects and surface steps are clearly visible in the crystalline core. A pronounced narrowing of the ZnTe nanocrystal size distribution with increasing Dts also was found. The results demonstrate that the size of laser-ablated nanoparticles can be controlled by varying the molecular weight and pressure of an ambient gas and that nanometer-scale particles can be synthesized. Larger aggregates of both ZnTe and Si having a “flakelike” or “weblike” structure were formed at the higher ambient gas pressures; for ZnTe these appear to be open agglomerates of much smaller (∼10 nm) particles.


2002 ◽  
Vol 186 (1-4) ◽  
pp. 95-99 ◽  
Author(s):  
F. Weisbuch ◽  
V.N. Tokarev ◽  
S. Lazare ◽  
D. Débarre

1992 ◽  
Vol 196 (3-4) ◽  
pp. 264-270 ◽  
Author(s):  
R. Pinto ◽  
S.P. Pai ◽  
C.P. D'Souza ◽  
L.C. Gupta ◽  
R. Vijayaraghavan ◽  
...  

2007 ◽  
Vol 253 (18) ◽  
pp. 7585-7590 ◽  
Author(s):  
V. Oliveira ◽  
R. Colaço ◽  
R. Vilar
Keyword(s):  

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