An angle‐resolved, wavelength‐dispersive x‐ray fluorescence spectrometer for depth profile analysis of ion‐implanted semiconductors using synchrotron radiation

1992 ◽  
Vol 63 (1) ◽  
pp. 1194-1197 ◽  
Author(s):  
W. Schmitt ◽  
J. Hormes ◽  
U. Kuetgens ◽  
W. H. Gries
Keyword(s):  
Synchrotron Radiation ◽  
Depth Profile ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
X Ray ◽  
Fluorescence Spectrometer ◽  
Ion Implanted

scholarly journals In-depth Profile Analysis in Metal/high-k Gate Stack Structures Studied by Synchrotron-radiation Photoelectron Spectroscopy

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (9) ◽  
pp. 441-447
Author(s):  
Satoshi TOYODA ◽  
Hiroyuki KAMADA ◽  
Hiroshi KUMIGASHIRA ◽  
Masaharu OSHIMA ◽  
Kunihiko IWAMOTO ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Depth Profile ◽  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
Gate Stack ◽  
High K

Soft X-ray Emission Depth Profile Analysis: SXDA

1985 ◽  
Vol 24 (1) ◽  
pp. 34-56 ◽  
Author(s):  
A. Szász ◽  
J. Kojnok
Keyword(s):  
Depth Profile ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
X Ray

X-Ray Photoelectron Spectroscopy Sputter Depth Profile Analysis of Spatially Controlled Microstructures in Conductive Polymer Films

1991 ◽  
Vol 63 (1) ◽  
pp. 60-65 ◽  
Author(s):  
Susan G. MacKay ◽  
Mohammad. Bakir ◽  
Inga H. Musselman ◽  
Thomas J. Meyer ◽  
Richard W. Linton
Keyword(s):  
Depth Profile ◽  
Polymer Films ◽  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Conductive Polymer ◽  
Depth Profile Analysis ◽  
X Ray

Depth profile analysis of ion-implanted photoresist by infrared spectroscopy

2002 ◽  
Vol 33 (7) ◽  
pp. 545-551 ◽  
Author(s):  
N. Nagai ◽  
T. Imai ◽  
K. Terada ◽  
H. Seki ◽  
H. Okumura ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Depth Profile ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
Ion Implanted
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