In-depth Profile Analysis in Metal/high-k Gate Stack Structures Studied by Synchrotron-radiation Photoelectron Spectroscopy
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2008 ◽
Vol 43
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pp. 289-292
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2008 ◽
Vol 100
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pp. 012042
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1990 ◽
Vol 15
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pp. 463-465
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2014 ◽
Vol 29
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pp. 2072-2077
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